Lasers | Center wavelength | 405 nm | 488 nm | 561 nm | 638 nm |
Band tolerance (nm) | ±5 | ±5 | ±2 | ±2 | |
Output power (mW) | 34 | 19 | 19 | 21 | |
RMS noise level (10 Hz ~ 10 MHz) | < 0.15% | < 0.15% | < 0.10% | < 0.15% | |
RMS noise level (10 Hz ~ 10 MHz) | > 100 | > 500 | > 100 | > 100 | |
Polarization Extinction Ratio (PER) | > 100:1 | ||||
Power stability | Less than 2% during 5 hours | ||||
Optical fiber | Effective NA | 0.075 | |||
Length (m) | 1.0 ~ 3.0 | ||||
Mode | Single mode optical fiber | ||||
Interface connector | FC/APC | ||||
Control parameter | Output power | Independently adjustable | |||
Output On/Off | Independently controlled | ||||
Dimensions | Size (W x H x D) (mm) | 448 x 233 x 410 | |||
Weight (/w 4 lasers) | Approx. 16 kg |
Fine scan is performed by piezoelectric actuator (PZT).
Dual scan mode by fine and long scanner is available only for single lens type.
100 times measurement of standard sample (1μm step height) with 100× / 0.95 objective.
100 times measurement of standard sample (5μm pitch) with 100× / 0.95 objective.